仪器名称：原子力显微镜

 仪器型号：MFP-3D Infinity

 生产厂商：牛津仪器Asylum Research

 技术指标:  Precise, Ultra-low Noise

                 Closed-loop Scanner

                  X&Y range 90 µm

                 X&Y sensors<150 pm noise

                 Z range >15 µm (>40 µm option)

                 Z sensor<35 pm noise

                Low-noise, High Bandwidth OpticaLever

              Cantilever deflection sensing uses an inverted

             configuration (incident beam off-vertical) to dramatically

              reduce interference from light reflected by the sample.

              Light source Low-coherence infrared (860 nm)

             superluminescent diode, FDA/IEC Class 1M (Non-hazardous)

              DC detector noise<10 pm

             Detector bandwidth 7 MHz

             High Resolution System Performance

             DC height noise<20 pm

            AC height noise<20 pm